Improved Methods for the Fabrication of Damascene Templates
![Ahmed Busnaina](https://sp-ao.shortpixel.ai/client/to_webp,q_glossy,ret_img,w_600,h_400/https://coe.northeastern.edu/wp-content/uploads/profiles/mie/busnaina-a-rect.png)
University Distinguished and William Lincoln Smith Professor Ahmed Busnaina, mechanical and industrial engineering, was awarded a patent for “Damascene template for nanoelement printing fabricated without chemomechanical planarization.”
Abstract Source: USPTO
Methods of fabricating a damascene template for electrophoretic assembly and transfer of patterned nanoelements are provided which do not require chemical mechanical polishing to achieve a uniform surface area. The methods include conductive layer fabrication using a combination of precision lithography techniques using etching or building up the conductive layer to form raised conductive features separated by an insulating layer of equal height.