Electrical and Computer Engineering Seminar: Alper Ozgurluk
138 ISEC High-Q Strong Coupling Capacitive-Gap Transduced RF Micromechanical Resonators Abstract: This talk presents a hierarchical, intuitive, and technology agnostic procedure for designing RF channel-select filters, followed by an actual demonstration that consists of 96 mechanically coupled capacitive-gap-transduced polysilicon disk resonators, centered at 224MHz with only 0.1% (9kHz) bandwidth, all while attaining 2.7dB insertion loss […]