Matteo Rinaldi
Professor,
Electrical and Computer Engineering
Director,
Institute for NanoSystems Innovation
Office
- 617.373.2751
Research Focus
MEMS, piezoelectric and acoustic devices for sensing, RF, and semiconductor systems
About
Matteo Rinaldi is a Full Professor of Electrical and Computer Engineering at Northeastern University and a leader in semiconductor devices and microsystems. He serves as Director of the Institute for NanoSystems Innovation (NanoSI) and Director of the Kostas Nanotechnology Facility (KNF), where he leads research, infrastructure, and partnerships spanning MEMS, piezoelectric and acoustic devices, RF systems, and semiconductor technologies. His work bridges fundamental device research with scalable fabrication and real-world deployment across sensing, communications, and emerging semiconductor applications.
Matteo Rinaldi was the recipient of the Best Student Paper Award at the 2009 and 2011 IEEE International Frequency Control Symposiums. In March 2011 he was awarded with the S. J. Stein Prize for his superior achievements in the field of new or unique materials or applications for materials in electronics.
Matteo Rinaldi joined the Electrical and Computer Engineering department at Northeastern University as an Assistant Professor in the Spring 2012 semester.
Honors & Awards
- IEEE International Frequency Control Symposium (IFCS) 2025 Walter G. Cady Award, 2025
- Northeastern University Global Network Accelerator Award, 2024
- Optica Fellow
- College of Engineering Faculty Fellow
- IEEE Sensors Council Early Career Award
- Defense Advanced Research Projects Agency Young Faculty Award
- NSF CAREER Award
Leadership Positions
In addition to his research activities, Professor Rinaldi provides leadership in semiconductor research infrastructure and shared-use facilities at Northeastern University. He oversees advanced nanofabrication, device integration, and characterization capabilities supporting interdisciplinary research and external partnerships with industry, government, and academic collaborators.
Research Overview
MEMS, piezoelectric and acoustic devices for sensing, RF, and semiconductor systems
Northeastern Sensors & Nano Systems Laboratory
Professor Rinaldi’s research focuses on semiconductor devices and microsystems, with particular emphasis on MEMS, piezoelectric and acoustic technologies for sensing, RF, and integrated systems. His group develops novel device architectures and fabrication approaches that connect materials, devices, and system-level performance, enabling new capabilities in sensing, communications, and low-power electronics. His work spans device design, modeling, fabrication, and experimental validation, with an emphasis on scalable semiconductor processes and translation to real-world applications.
Selected Research Projects
- Enabling Higher Scale Factors in Gyroscopes Through soFt and LacAlized interface-States in microelectromecHanical resonators (FLASH)
- – co-Principal Investigator, DARPA
- Cognitive Distributed Sensing in Congested Radio Frequency Environments
- – co-Principal Investigator, U.S. Army Research Laboratory
- Nano-opto-mechanical Piezoelectric Resonant Infrared-sensitive Metamaterials for Quantum-Limited Photodetection
- – Principal Investigator, DARPA
- High-Performance and Miniaturized Greenhouse Gas Sensor for Drone-based Remote Sensing
- – Principal Investigator, Department of Energy Advanced Research Projects Agency-Energy
- CAREER: Nano Electro Mechanical Resonant Sensing Platform for Chip Scale, High Resolution and Ultra-Fast Terahertz Spectroscopy and Imaging
- – Principal Investigator, National Science Foundation
- Microelectromechanical Resonant Circulator (MIRC)
- – Principal Investigator, DARPA MTO SPAR Program
- Plasmonic Microelectromechanical Infrared Digitizer (PLASMID)
- – Principal Investigator, DARPA MTO N-Zero Program
- Zero Power Sensors (ZePS)
- – Principal Investigator, DARPA MTO N-Zero Program
Research Centers and Institutes
Department Research Areas
Selected Publications
- Hui, Yu, Kang, Sungho, Qian, Zhenyun, Rinaldi, Matteo (2021). Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface. Journal of Microelectromechanical Systems, 30(1),165-172. 10.1109/JMEMS.2020.3040953
- Hussein, Hussein M. E., Ibrahim, Mahmoud A. A., Rinaldi, Matteo, Onabajo, Marvin, Cassella, Cristian (2021). Reflective Parametric Frequency-Selective Limiters With Sub-dB Loss and μWatts Power Thresholds. IEEE Transactions on Microwave Theory and Techniques, 69(6),2989-3000. 10.1109/TMTT.2021.3072587
- Hussein, Hussein M. E., Rinaldi, Matteo, Onabajo, Marvin, Cassella, Cristian (2021). A chip-less and battery-less subharmonic tag for wireless sensing with parametrically enhanced sensitivity and dynamic range. Scientific Reports, 11(1). 10.1038/S41598-021-82894-X
- Calisgan, Sila Deniz, Rajaram, Vageeswar, Kang, Sungho, Risso, Antea, Qian, Zhenyun, Rinaldi, Matteo (2020). Micromechanical Switch-Based Zero-Power Chemical Detectors for Plant Health Monitoring. Journal of Microelectromechanical Systems, 29(5),755-761. 10.1109/JMEMS.2020.3007309
- Chen, Guofeng, Rinaldi, Matteo (2020). Aluminum Nitride Combined Overtone Resonators for the 5G High Frequency Bands. Journal of Microelectromechanical Systems, 29(2),148-159. 10.1109/JMEMS.2020.2975557
- Herrera, Bernard, Pop, Flavius, Cassella, Cristian, Rinaldi, Matteo (2020). Miniaturized PMUT-Based Receiver for Underwater Acoustic Networking. Journal of Microelectromechanical Systems, 29(5),832-838. 10.1109/JMEMS.2020.3018070
- Hussein, Hussein M. E., Ibrahim, Mahmoud A. A., Michetti, Giuseppe, Rinaldi, Matteo, Onabajo, Marvin, Cassella, Cristian (2020). Systematic Synthesis and Design of Ultralow Threshold 2:1 Parametric Frequency Dividers. IEEE Transactions on Microwave Theory and Techniques, 68(8),3497-3509. 10.1109/TMTT.2020.2999790
- Pop, Flavius, Herrera, Bernard, Cassella, Cristian, Rinaldi, Matteo (2020). Modeling and Optimization of Directly Modulated Piezoelectric Micromachined Ultrasonic Transducers. Sensors, 21(1),157. 10.3390/S21010157
- Pop, Flavius, Herrera, Bernard, Cassella, Cristian, Rinaldi, Matteo (2020). Enabling Real-Time Monitoring of Intrabody Networks through the Acoustic Discovery Architecture. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 67(11),2336-2344. 10.1109/TUFFC.2020.3002973
Sep 08, 2025
Northeastern University Hosts Inaugural Summer School of Vibrometry in Collaboration with Polytec — A Resounding Success!
The Institute for NanoSystems Innovation (NanoSI), in partnership with Polytec’s technical team, successfully convened the inaugural Summer School of Vibrometry on August 20–21, 2025, at Northeastern University’s Boston campus. This […]
Sep 08, 2025
Zepsor Technologies Taps Spark Fund to Scale Zero-Power Sensor Solutions
ECE Professor Matteo Rinaldi and Associate Research Professor Zhenyun Qian founded Zepsor Technologies, an innovative tech company that has developed a zero-power sensor that could reduce the demand for battery replacements.
Jun 03, 2025
New Wireless Sensing Technology Based on Ising Dynamics
ECE Assistant Research Professor Luca Colombo, Professor Matteo Rinaldi, and Associate Professor Cristian Cassella published research on “Programmable Threshold Sensing in Wireless Devices Using Ising Dynamics” in Nature Electronics. They embedded intelligence capabilities in a wireless sensor tag that has the potential to revolutionize the Internet of Things and AI by improving accuracy and reducing energy use.
May 20, 2025
Innovating Nanoscale Semiconductor Technologies
The spring 2025 edition of The Brief publication provides a deep-dive into the variety of innovative research being conducted in nanoscale semiconductor technologies at the Institute for NanoSystems Innovation at Northeastern University. View and download The Brief.
Apr 22, 2025
Rinaldi Receives 2025 IFCS Walter G. Cady Award
ECE Professor Matteo Rinaldi received the IEEE International Frequency Control Symposium (IFCS) 2025 Walter G. Cady Award for his technical contributions in the area of piezoelectric frequency control devices.
Feb 18, 2025
$2M DARPA Award for MEMS Inertial Sensor To Revolutionize Navigation Systems
ECE Associate Professor Cristian Cassella (PI), Professor Matteo Rinaldi, Professor David Horsley, and Assistant Professor Benyamin Davaji were awarded a $2 million DARPA grant for “Enabling Higher Scale Factors in Gyroscopes Through soFt and LacAlized interface-States in microelectromecHanical resonators (FLASH).”
Jan 02, 2025
Patent for Zero-Power Sensing Technology
ECE Professor Matteo Rinaldi and Associate Research Professor Zhenyun Qian were awarded a patent for “Zero power micromechanical switch-based sensing and monitoring system.”
Oct 16, 2024
Advancing Northeastern’s Bicoastal Mission To Develop Next-Generation Silicon Chips
The Institute for NanoSystems Innovation, led by ECE Professors Matteo Rinaldi and David Horsley as director and deputy director, respectively, is growing its bicoastal initiative to pioneer advanced semiconductor design by collaborating with faculty, industry, and graduate students from the Boston and Oakland campuses.
Aug 08, 2024
Patent for Ultra-Low Power Sensor for Remote Monitoring
ECE Professor Matteo Rinaldi and Associate Research Professor Zhenyun Qian were awarded a patent for “Sensor and method using bi-stable digitizing micromechanical switches for analog measurement of input signals.”
Aug 02, 2024
Revolutionizing Quantum Technology With Metamaterial-based Detectors
ECE Assistant Professor Marco Colangelo, Professor Matteo Rinaldi, and Assistant Professor Benyamin Davaji were awarded a $330,000 NSF grant for “Metamaterial-Enabled Superconducting Nanowire Detectors for High Temperature Operation.”