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Creating Pressure Sensors with Higher Sensitivity over a Wider Range

ECE Professor & Chair Srinivas Tadigadapa was awarded a patent for creating a “Micromachined bulk acoustic wave resonator pressure sensor”.


Abstract Source: USPTO

A pressure sensor includes a piezoelectric substrate having a generally planar structure and an anchor location fixing the piezoelectric substrate at the periphery of the planar structure of the piezoelectric substrate. The planar structure of the piezoelectric substrate has a first region having a first characteristic thickness adjacent to the anchor location, and a second region have a second characteristic thickness at a middle region of the substrate. The second characteristic thickness is less than the first characteristic thickness such that the planar structure in the second region is displaced relative to the neutral axis of the planar structure such that while undergoing bending the second region has either mostly compressive or mostly tensile stress.

Related Faculty: Srinivas Tadigadapa

Related Departments:Electrical & Computer Engineering