Improved Methods for the Fabrication of Damascene Templates

Ahmed Busnaina

University Distinguished and William Lincoln Smith Professor Ahmed Busnaina, mechanical and industrial engineering, was awarded a patent for “Damascene template for nanoelement printing fabricated without chemomechanical planarization.”

Abstract Source: USPTO

Methods of fabricating a damascene template for electrophoretic assembly and transfer of patterned nanoelements are provided which do not require chemical mechanical polishing to achieve a uniform surface area. The methods include conductive layer fabrication using a combination of precision lithography techniques using etching or building up the conductive layer to form raised conductive features separated by an insulating layer of equal height.

Related Faculty: Ahmed Busnaina

Related Departments:Mechanical & Industrial Engineering