Improving RF Resonator Technology
ECE Associate Professor Cristian Casella and electrical engineering student Xuanyi Zhao, PhD’23 were awarded a patent for “Two dimensional rod resonator for RF filtering.”
Abstract Source: USPTO
A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.
