The Northeastern University SMART Center Deploys an Evatec CLUSTERLINE® 200 for Manufacturing High Performance Piezoelectric Micro and Nano Systems

professor in clean room lab clothes standing in front of Evatec's equipment in lab

Photo by Ruby Wallau, Northeastern University

The Northeastern University SMART Center added the Evatec’s CLUSTERLINE® 200 to its nanofabrication capability.

This is the first Evatec’s CLUSTERLINE® 200 tool deployed in an academic institution in the United States providing the SMART Center with a unique cutting-edge capability to perform research, development and pilot manufacturing of high-performance piezoelectric micro and nano systems.

This unique capability has been enabled by a partnership established between the Northeastern University SMART Center and the equipment manufacturer Evatec.

This partnership will help accelerate developments in state-of-the-art piezoelectric materials and devices. The CLUSTERLINE® 200 tool provides the SMART Center and its team of scientists with a cutting-edge capability not only to perform research and development but also pilot manufacturing of high-performance piezoelectric micro and nano systems. The Evatec’s CLUSTERLINE® 200 tool enables the deposition of Aluminium Nitride (AlN) and Scandium-doped Aluminium Nitride (ScAlN) piezoelectric thin films on 8-inch substrates with great control over crystallinity, stress, stoichiometry and uniformity.

“This is the same tool that is available in several commercial foundries which allows us to prototype our cutting-edge sensing, computation and communication micro/nano devices using a production-proven, versatile and scalable manufacturing process. This is essential to accelerate the transition of our new technologies into systems and products addressing commercial and Department of Defense needs,” said Professor Matteo Rinaldi, Director of the Northeastern University SMART Center.

“We are extremely pleased to be the Northeastern University SMART Center’s technology partner in thin film deposition. We look forward to supporting the SMART Center in the development of scalable technology platforms and pilot manufacturing for the next generation piezoelectric micro and nano systems,” said Silvan Wuethrich, Head of Evatec’s Semiconductor Business Unit.

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Related Faculty: Matteo Rinaldi

Related Departments:Electrical & Computer Engineering